S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

S&M Young Researcher Paper Award 2021
Award Criteria
Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Optical and Electrical Properties of Mo-doped Zr:ZnO Multilayer Thin Films for Photosensor Applications

Ming-Yu Yen, Tao-Hsing Chen, Po-Hsun Lai, Sheng-Lung Tu, and Yun-Hwei Shen

(Received October 26, 2021; Accepted December 13, 2021)

Keywords: Zr:ZnO, molybdenum, multilayer films, radio-frequency magnetron sputtering, vacuum annealing

We investigated the structural, optical, and electrical properties of molybdenum and zirconium-doped zinc oxide (ZZO) with a purity of 99.99% deposited on a glass substrate by radio-frequency magnetron sputtering and annealed at different temperatures. The doping amount of zirconium on the ZnO was 3 wt%. The optimal resistivity of the multilayers, 5.1×10−3 Ω-cm, was observed for an annealing temperature of 400 ºC. This film also had the highest transmittance of 93%. Moreover, the optimal figure of merit, 4.6×10−6 Ω-1, was observed for an annealing temperature of 400 ºC. Furthermore, the grain size also increased with increasing annealing temperature, as observed by scanning electron microscopy. Mo/ZZO multilayer thin films with such excellent optical and electrical properties can be applied on photosensors.

Corresponding author: Tao-Hsing Chen

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