S&M Young Researcher Paper Award 2020
Recipients: Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li [Winner's comments]
Paper: High Fill Factor Array of Piezoelectric Micromachined
Ultrasonic Transducers with Large Quality Factor

S&M Young Researcher Paper Award 2021
Award Criteria
Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語


 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.

MYU Research

(proofreading and recording)

(translation service)

The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Copyright(C) MYU K.K.

Smooth Surface with U-groove Structures for Light-detecting Area of Photodetectors Using Dual-doped TMAH

Kamonwan Suttijalern and Surasak Niemcharoen

(Received May 15, 2021; Accepted September 1, 2021)

Keywords: U-groove structure, anisotropic etching, oxidizing agent, smooth surface, silicon photodetectors

Microelectromechanical system (MEMS) fabrication has gained popularity as a means of etching silicon substrates. This paper discusses the surface texturization of a U-groove structure by a very simple and cost-effective technique for use as a U-groove metal–semiconductor–metal (UMSM) photodetector with aluminum/n-Si/aluminum materials. A series of etching experiments were carried out involving the addition of ammonium peroxodisulfate [(NH4)2SO4] at different concentrations to tetramethyl ammonium hydroxide (TMAH)/silicic acid etching solution, also called dual-doped TMAH. It was found that the addition of 11.5 g/l (NH4)2SO4 to TMAH/silicic acid enhances the smoothness of the surface and prevents the unwanted etching of exposed aluminum. We utilized dual-doped TMAH in the fabrication of a nanostructure in a U-groove photodetector and found that the U-groove photodetector has a ~59% higher photocurrent than that of a planar photodetector. The U-groove photodetector demonstrates that increasing the light-detecting area results in high photocurrent performance for high-efficiency optical devices.

Corresponding author: Surasak Niemcharoen

Forthcoming Regular Issues

Forthcoming Special Issues

Special Issue on Advanced Methods and Devices for Remote Sensing
Guest editor, Lei Deng and FuZhou Duan (Capital Normal University, Beijing)

Special Issue on Microfluidics and Related Nano/Microengineering for Medical and Chemical Applications
Guest editor, Yuichi Utsumi (University of Hyogo)
Call for paper

Special Issue on International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2019 (Bio4Apps 2019) (2)
Guest editor, Hirofumi Nogami and Masaya Miyazaki (Kyushu University)
Conference website

Special Issue on Biological Odor Sensing System and Their Applications
Guest editor, Takeshi Sakurai (Tokyo University of Agriculture)

Special Issue on High-sensitivity Sensors and Sensors for Difficult-to-measure Objects
Guest editor, Ki Ando (Chiba Institute of Technology)
Call for paper

Special Issue on Sensing Technologies and Their Applications (II)
Guest editor, Rey-Chue Hwang (I-Shou University)
Call for paper

Copyright(C) MYU K.K. All Rights Reserved.