pp. 349-358
S&M178 Research Paper Published: 1994 Amorphous Silicon Carbide and Its Application in Silicon Micromachining [PDF] A. Klumpp, U. Schaber, H. L. Offereins, K. Kühl and H. Sandmaier Cite this article A. Klumpp, U. Schaber, H. L. Offereins, K. Kühl and H. Sandmaier, Amorphous Silicon Carbide and Its Application in Silicon Micromachining, Sens. Mater., Vol. 6, No. 6, 1994, p. 349-358. |