pp. 173-188
S&M79 Research Paper Published: 1991 Wafer Fusion Bonding: Characterization of the Bond Quality [PDF] Christine Harendt, Heinz-Gerd Graf, Bernd Höfflinger and Elisabeth Penteker Cite this article Christine Harendt, Heinz-Gerd Graf, Bernd Höfflinger and Elisabeth Penteker, Wafer Fusion Bonding: Characterization of the Bond Quality, Sens. Mater., Vol. 3, No. 3, 1991, p. 173-188. |