Young Researcher Paper Award 2023
🥇Winners

Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 34, Number 11(3) (2022)
Copyright(C) MYU K.K.
pp. 4127-4136
S&M3101 Research Paper of Special Issue
https://doi.org/10.18494/SAM4133
Published: November 24, 2022

Effect of Annealing Temperatures on Optical and Electrical Properties of TiO2/Mo Multilayer Films for Photosensor Applications [PDF]

Chi-Fan Liu, Shih-Chen Shi, Tao-Hsing Chen, and Guan-Lin Guo

(Received June 2, 2022; Accepted October 26, 2022)

Keywords: TiO2/Mo, multilayer thin film, optical property, electrical property, sensor

In this study, titanium dioxide (TiO2) and molybdenum (Mo) with a purity of 99.99% were deposited on a glass substrate under various parameters through RF magnetron sputtering to form TiO2/Mo bilayer and TiO2/Mo/TiO2 multilayer transparent conductive thin films. In addition, the films were annealed in vacuum at various temperatures to adjust their internal crystallization through thermal energy such that they exhibited replacement characteristics and fewer internal defects. After the bilayer films with a Mo-doped metal layer and the TiO2/Mo/TiO2 multilayer films were annealed, the thickness, electrical properties, optical properties, surface structure, and figure of merit (FOM) of the thin films were examined. The results indicated that the TiO2/Mo bilayer films had a low resistivity of 1.97 × 10−1 Ω-cm before annealing and an average transmittance rate of 66.59%; the unannealed TiO2/Mo/TiO2 multilayer films had a resistivity of 7.21 × 10−3 Ω-cm and an average transmittance rate of 69.34%. The optical transmittance of both structures tended to increase with their annealing temperature, and an optimal light transmittance rate of 77% was achieved. For the FOM, the optimal values of the bilayer and multilayer structures were 5.96 × 10−7 and 4.46 × 10−5 Ω−1, respectively. The results indicate that TiO2/Mo/TiO2 thin films are suitable for photosensor applications.

Corresponding author: Tao-Hsing Chen


Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Chi-Fan Liu, Shih-Chen Shi, Tao-Hsing Chen, and Guan-Lin Guo, Effect of Annealing Temperatures on Optical and Electrical Properties of TiO2/Mo Multilayer Films for Photosensor Applications, Sens. Mater., Vol. 34, No. 11, 2022, p. 4127-4136.



Forthcoming Regular Issues


Forthcoming Special Issues

Applications of Novel Sensors and Related Technologies for Internet of Things
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper


Special Issue on Advanced Data Sensing and Processing Technologies for Smart Community and Smart Life
Guest editor, Tatsuya Yamazaki (Niigata University)
Call for paper


Special Issue on Advanced Sensing Technologies and Their Applications in Human/Animal Activity Recognition and Behavior Understanding
Guest editor, Kaori Fujinami (Tokyo University of Agriculture and Technology)
Call for paper


Special Issue on International Conference on Biosensors, Bioelectronics, Biomedical Devices, BioMEMS/NEMS and Applications 2023 (Bio4Apps 2023)
Guest editor, Dzung Viet Dao (Griffith University) and Cong Thanh Nguyen (Griffith University)
Conference website
Call for paper


Special Issue on Piezoelectric Thin Films and Piezoelectric MEMS
Guest editor, Isaku Kanno (Kobe University)
Call for paper


Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2023)
Guest editor, Sheng-Joue Young (National United University)
Conference website
Call for paper


Copyright(C) MYU K.K. All Rights Reserved.