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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 34, Number 5(4) (2022)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2007-2013
S&M2950 Technical Paper of Specal Issue https://doi.org/10.18494/SAM3911 Published: May 31, 2022 Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications [PDF] Shih-Hung Lin, Chi-Hang Siu, Yuan-Ting Wang, and Yao-Chin Wang (Received March 31, 2022; Accepted May 12, 2022) Keywords: inspection, IGZO, thin-film transistor, foldable device
In this study, we report the flaw detection properties of amorphous In–Ga–Zn–O (IGZO)-based active-matrix thin-film transistors (TFTs) on foldable device applications. Foldable and thinned-glass substrates are two different types of critical flexible substrate for defect inspection, which are also difficult to check by traditional in situ inspection techniques for mass production. The technique we proposed is based on the noninvasive optoelectronic transforming principle to inspect flaw pixels, with the advantages of an ultrahigh resolution, a small pixel array, and no contact damage. This method can be applied to foldable substrates with an ultrahigh-definition (UHD) TFT array panel and digital X-ray detectors. The experimental data showed good flaw detection rate (>90.1%) and fail detection rate (<4.9%).
Corresponding author: Yao-Chin Wang  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Shih-Hung Lin, Chi-Hang Siu, Yuan-Ting Wang, and Yao-Chin Wang, Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications, Sens. Mater., Vol. 34, No. 5, 2022, p. 2007-2013. |
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