pp. 323-336
S&M122 Research Paper Published: 1992 Accurate 3D Capacitance Evaluation in Integrated Capacitive Humidity Sensors [PDF] J. G. Korvink, L. Chandran, T. Boltshauser and H. Baltes Cite this article J. G. Korvink, L. Chandran, T. Boltshauser and H. Baltes, Accurate 3D Capacitance Evaluation in Integrated Capacitive Humidity Sensors, Sens. Mater., Vol. 4, No. 6, 1992, p. 323-336. |