pp. 313-320
S&M28 Letter Published: 1989 Perpendicular Walls Fabricated in <100>-Oriented Silicon by Anisotropic Wet Etching [PDF] L. Tenerz, Y. Backlund, J. Tiren and J. O’Connell Cite this article L. Tenerz, Y. Backlund, J. Tiren and J. O’Connell, Perpendicular Walls Fabricated in <100>-Oriented Silicon by Anisotropic Wet Etching, Sens. Mater., Vol. 1, No. 6, 1989, p. 313-320. |